SUBSTRATE ALIGNING DEVICE, A SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME, AND A SUBSTRATE ALIGNING METHOD, CAPABLE OF AUTOMATICALLY ALIGNING A MASK ON A SUBSTRATE

摘要

PURPOSE: A substrate aligning device, a substrate processing device including the same, and a substrate aligning method are provided to automatically align a substrate and a mask by using a horizontal transfer unit which pushes the substrate and the mask by interlocking with the lifting operation of a susceptor.;CONSTITUTION: A position fixing unit(320) is protrusively combined with the upper side of a susceptor(300) which is vertically driven in a chamber(200) including an inner space. The position fixing unit forms a reference line when the substrate and the mask are aligned. A horizontal transfer unit(400) is combined to pass through the inner space on the outer side which does not face the chamber. The horizontal transfer unit successively transfers the substrate and the mask until the horizontal transfer is stopped on the susceptor by the position fixing unit by interlocking with the vertical transfer of the susceptor. A controller controls the driving of the susceptor and the horizontal transfer unit.;COPYRIGHT KIPO 2011