INSPECTION PARAMETER SETTING METHOD, AN INSPECTION ESTIMATING METHOD, AND AN INSPECTION SYSTEM TO OBTAIN THE OPTIMUM CALIBRATION LOCATION

摘要

PURPOSE: An inspection parameter setting method, an inspection estimating method, and an inspection system are provided to improve inspection efficiency and optimize the inspection lead time by estimating the time for a verify process.;CONSTITUTION: An inspection parameter setting method is as follows. CAD data is synthesized and the synthesized CAD data is revised based on etching factors. A luminance component map is created from an inspection surface(114). Groups of luminance components are obtained based on the luminance component map. One or more luminance evaluation areas including the whole groups are determined(117). The luminance evaluation areas are photographed with an inspection system(118). Luminance data corresponding to each luminance component is obtained and analyzed to obtain each statistic luminance(119).;COPYRIGHT KIPO 2011