APPARATUS FOR SEPARATING A GAS-LIQUID AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

摘要

gas-liquid separation unit separates the box , the filter unit , exhaust pipes and drains should include . Removing the box is a gas-liquid inlet is formed in the upper inlet . Filter portion being disposed below the inlet from the inside of a separate box , and filtering a liquid component from a flowing liquid . The exhaust pipe is closed and the top is facing the filter unit connected to the bottom of the separation box , the at least one exhaust port are formed for the exhaust of the gas -liquid ingredients pass through the filter on the side . Water pipe is connected to the lower portion of the exhaust pipe and the adjacent separation box , thereby draining the liquid component of the liquid filtered in the filter unit . Thus , while minimizing the installation space can be simply remove the liquid component and the gas component from the gas-liquid .