COATER CHUCK OF A COATING APPARATUS MADE OF A MATERIAL SUCH AS GRANITE RESISTING THERMAL TRANSFORMATION

摘要

PURPOSE: A coater chuck of a coating apparatus is provided to uniformly spray photoresist on a glass substrate through t slit nozzle by maintaining gap between the slit nozzle, and the coater chuck steadily.;CONSTITUTION: A coater chuck(103) of a coating equipment is connected to a driving axis(105) capable of moving in horizontal direction by a servo motor(107). A glass substrate in which photoresist is spread through the slit nozzle is settled. The glass substrate is composed of stone material such as granite. The stone material includes corrosion resistance material about the non-magnetic material. The thickness of the stone is 15 mm or greater.;COPYRIGHT KIPO 2011