METHOD FOR FORMING ZNO NANOWIRES PATTERNED SELECTIVELY ON SUBSTRATE VIA WET ETCHING

摘要

PURPOSE: A method for forming ZnO nanowires is provided to grow zinc oxide nano wires on a patterned zinc oxide seed layer on a substrate through wet etching and to enhance the relation with a semiconductor process. CONSTITUTION: A method for forming ZnO nanowires comprises the steps of: laminating a zinc oxide seed layer on a substrate; patterning the zinc oxide seed layer through a photolithography process; dipping a substrate in which a patterned zinc oxide seed layer is formed, in a mixed solution of ammonia and hydrogen peroxide to wet etch the zinc oxide seed layer of non-patterned part; and growing zinc oxide nano wires on the patterned zinc oxide seed layer.