POROUS METAL TARGET, A MANUFACTURING METHOD THEREOF, AND A METHOD FOR GENERATING EXTREME ULTRAVIOLET RAYS USING THE SAME, CAPABLE OF IMPROVING THE YIELD RATE OF PLASMA IN IRRADIATION OF LASER

摘要

PURPOSE: A porous metal target, a manufacturing method thereof, and a method for generating extreme ultraviolet rays using the same are provided to simplify equipment and processes for generating extreme ultraviolet rays, since laser pulses for generation of extreme ultraviolet rays are successively generated by a single device.;CONSTITUTION: A manufacturing method of porous metal targets(100) comprises following steps. A porous polymer structure is prepared. The porous polymer structure is coated with metal. The polymer compound is removed from the porous polymer structure.;COPYRIGHT KIPO 2011