PATTERNED SAPPHIRE SUBSTRATE AND A LIGHT EMITTING DEVICE USING THE SAME, CAPABLE OF INCREASING EXTERNAL QUANTIZATION EFFICIENCY

摘要

PURPOSE: A patterned sapphire substrate and a light emitting device using the same are provided to increase the density of a concavo-convex part compared to a honeycomb structure, thereby increasing optical power.;CONSTITUTION: A photoresist is applied on a sapphire substrate. A pattern is formed on the substrate through a lithography process. The substrate is etched using an RIE(Reactive Ion Etcher). A thin film of a light emitting diode structure is formed on the substrate using an MOVPE(Metal Organic Vapor Phase Epitaxy) process.;COPYRIGHT KIPO 2011