PROCESS MODULE, A SUBSTRATE PROCESSING APPARATUS AND A SUBSTRATE TRANSFER METHOD, CAPABLE OF REDUCING A RETURN TIME BY FORMING A RETURN PATH SHORT

摘要

PURPOSE: A process module, a substrate processing apparatus and a substrate transfer method are provided to improve throughput by arranging a plurality of process chambers to be adjacent to one transfer chamber.;CONSTITUTION: In a process module, a substrate processing apparatus and a substrate transfer method, a substrate transfer apparatus is arranged in a buffer chamber. The substrate transfer apparatus includes substrate supports(15U,15M,15D) and a rotation shaft. The rotation shaft independently rotates the substrate supports. A susceptor in which a wafer is loaded is arranged in a process chamber. A gate valve(GV2) is arranged between a buffer chamber and a process chamber.;COPYRIGHT KIPO 2011