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SUBSTRATE CENTERING DEVICE AND AN ORGANIC MATERIAL DEPOSITING SYSTEM, CAPABLE OF CENTERING A TARGET SUBSTRATE FOR AN ORGANIC MATERIAL
SUBSTRATE CENTERING DEVICE AND AN ORGANIC MATERIAL DEPOSITING SYSTEM, CAPABLE OF CENTERING A TARGET SUBSTRATE FOR AN ORGANIC MATERIAL
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机译:基材定心设备和有机材料沉积系统,能够为有机材料定靶基材
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摘要
PURPOSE: A substrate centering device and an organic material depositing system are provided to prevent the damage to a substrate due to clamping of a substrate cramp by preventing a substrate from overriding a roller member.;CONSTITUTION: In a substrate centering device and an organic material depositing system, a substrate support holder(210) supports the both sides of a substrate which is loaded by a robot. A substrate centering unit(250) is configured in the substrate support holder to be movable. A substrate clamper(290) is installed in the substrate support holder and is movable up and down. The substrate clamper clamps the substrate which is centered by the substrate centering unit. An operation unit(260) reciprocates the substrate centering unit.;COPYRIGHT KIPO 2011
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