首页> 外国专利> SUBSTRATE CENTERING DEVICE AND AN ORGANIC MATERIAL DEPOSITING SYSTEM, CAPABLE OF CENTERING A TARGET SUBSTRATE FOR AN ORGANIC MATERIAL

SUBSTRATE CENTERING DEVICE AND AN ORGANIC MATERIAL DEPOSITING SYSTEM, CAPABLE OF CENTERING A TARGET SUBSTRATE FOR AN ORGANIC MATERIAL

机译:基材定心设备和有机材料沉积系统,能够为有机材料定靶基材

摘要

PURPOSE: A substrate centering device and an organic material depositing system are provided to prevent the damage to a substrate due to clamping of a substrate cramp by preventing a substrate from overriding a roller member.;CONSTITUTION: In a substrate centering device and an organic material depositing system, a substrate support holder(210) supports the both sides of a substrate which is loaded by a robot. A substrate centering unit(250) is configured in the substrate support holder to be movable. A substrate clamper(290) is installed in the substrate support holder and is movable up and down. The substrate clamper clamps the substrate which is centered by the substrate centering unit. An operation unit(260) reciprocates the substrate centering unit.;COPYRIGHT KIPO 2011
机译:目的:提供一种基板对中装置和一种有机材料沉积系统,通过防止基板覆盖辊子部件来防止由于夹紧基板抽筋而对基板造成损坏。沉积系统中,基板支撑架(210)支撑由机器人装载的基板的两侧。基板定心单元(250)被配置为可移动的基板支撑支架。基板夹持器(290)安装在基板支撑架中并且可以上下移动。基板夹持器夹持由基板对中单元对中的基板。操作单元(260)使基板对中单元往复运动。; COPYRIGHT KIPO 2011

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