SILICON SOURCE MATERIAL CHARGING SUPPORT CAPABLE OF CHARGING THE SILICON SOURCE MATERIAL IN A QUARTZ CRUCIBLE

摘要

PURPOSE: A silicon source material charging support is provided to prevent the generation of a short by minimizing the loss of silicon source material by charging the silicon source material in a quartz crucible.;CONSTITUTION: A lifter raises a silicon epitaxial ingot. A silicon source material is loaded into a quartz crucible. A silicon source material charging support is manufactured in order to stably charge the silicon source material in the quartz crucible. The silicon source material charging support prevents impacts from being applied to the quartz crucible.;COPYRIGHT KIPO 2011