QUARTZ CRUCIBLE DEFORMATION PREVENTION APPARATUS IN THE SILICON SINGLE CRYSTAL GROWING APPARATUS, CAPABLE OF IMPROVING THE YIELD RATE

摘要

PURPOSE: A quartz crucible deformation prevention apparatus in the silicon single crystal growing apparatus is provided to prevent the deformation of the quartz crucible in the high temperature by installing a ring of molybdenum material on the top of the quartz crucible.;CONSTITUTION: The quartz crucible is fixed by a graphite crucible(105) split into three pieces. A heating element support stand(107) and an electrical rod(109) are fixed by a nut. A molybdenum ring is manufactured using the molybdenum which is not deformed in the high temperature. The molybdenum ring is installed on the upper part of the quartz crucible.;COPYRIGHT KIPO 2011