METHOD FOR MANUFACTURING A PALLADIUM-SILVER ALLOY DIFFUSION BARRIER LAYER CAPABLE OF IMPROVING THERMAL RESISTANCE

摘要

PURPOSE: A method for manufacturing a palladium-silver alloy diffusion barrier layer is provided to improve the durability of a palladium-silver alloy diffusion barrier layer by minimizing the diffusion of metal components. ;CONSTITUTION: A method for manufacturing a palladium-silver alloy diffusion barrier layer is as follows. A porous metal supporting body is formed using fine metal powder. The surface of the porous metal supporting body is finely grinded and processed. A palladium-metal coating layer and a silver metal coating layer are formed on the porous metal supporting body is formed through a high-temperature sputtering process. A palladium-silver alloy coating layer is formed by heat-treating the palladium-metal coating layer and the silver metal coating layer with low-temperature.;COPYRIGHT KIPO 2011