MASKLESS EXPOSURE APPARATUS AND A METHOD FOR CALIBRATING THE MULTI-HEAD OF THE SAME CAPABLE OF EXPOSING PATTERNS ON A SUBSTRATE USING A LIGHT MODULATING DEVICE

摘要

PURPOSE: A maskless exposure apparatus and a method for calibrating the multi-head of the same are provided to shorten time required for a calibrating process by calibrating the position and the angle of a body tube. ;CONSTITUTION: A stage(10) transfers a substrate(30). A multi optical system radiates beam to the substrate in order to expose patterns on the substrate. A plurality of body tubes guides the beam from the multi optical system to the substrate. A body tube driving unit drives the body tubes. A beam measuring unit(100) measures the position of the beam. A controlling unit controls the body tube driving unit in order to calibrate the positions and the angles of the body tubes.;COPYRIGHT KIPO 2011