ETCHANT FOR A METAL FILM OF A LIQUID CRYSTAL DISPLAY WITH EXCELLENT ETCHING UNFORMITY WHILE NOT GENERATING THE DAMAGES OF A PHOTORESIST LAYER USING COPPER IONS INSTEAD OF HYDROGEN PEROXIDE AS AN OXIDIZING AGENT

摘要

PURPOSE: An etchant for a metal film of a liquid crystal display is provided to maintain stable state without the composition change of etchant, to minimize lifetime reduction and capacity reduction, and to secure the uniformity of etching. ;CONSTITUTION: An etchant for a metal film of a liquid crystal display for etching a metal layer functioning as an electrode and a signal line including copper comprises: copper ions as an oxidizing agent; halogen ions; amines compound; organic acids; and etching inhibitors. The concentration of the copper ion is 0.5~20 weight%. The concentration of the halogen ion is 0.001~10 weight%. The concentration of the amines compound is 3~40 weight%. The concentration of the organic acid is 0.5~35 weight%. The concentration of the etching inhibitor is 0.001~5 weight%.;COPYRIGHT KIPO 2011