SUBSTRATE TRANSFER CONVEYOR DEVICE AND SUBSTRATE PROCESSING DEVICE, CAPABLE OF BEING USED FOR THE PLANAR PROCESSING OF LCD GLASS

摘要

PURPOSE: A substrate transfer conveyor device and a substrate processing device are provided to prevent a roller from becoming worn out by the contamination and of the roller and foreign materials. ;CONSTITUTION: A substrate transfer conveyor device comprises driven shafts(210), power transfer members, a driving member and a roller cleaning member(290). The driven shafts are arranged side by side in one direction. The driven shaft comprises a plurality of rollers, which make direct contact with a substrate. The power transfer member is installed on the driven shaft. The power transfer members transfers torque between them. The driving member supplies torque to at least one of the power transfer members. The roller cleaning member is located under the driven shaft and washes out foreign materials from the rollers.;COPYRIGHT KIPO 2011