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TRANSISTOR, MANUFACTURING METHOD THEREOF, AND AN ELECTRONIC DEVICE INCLUDING THE SAME CAPABLE OF IMPROVING THE RELIABILITY OF A FLAT DISPLAY DEVICE

机译:晶体管,其制造方法以及包括能够提高平板显示装置的可靠性的电子装置

摘要

PURPOSE: A transistor, a manufacturing method thereof, and an electronic device including the same are provided to suppress the property variation of a transistor due to light and moisture by including a second passivation layer including fluorine. ;CONSTITUTION: A source(S1) and a drain(D1) are connected to both ends of a channel layer(C1). A gate(G1) corresponds to the channel layer. A gate insulation layer(Gl1) is formed between the channel layer and the gate. A first passivation layer(P11,P12) covers the source, the drain, the gate, and the gate insulation layer, and the channel layer. The second passivation layer is formed on the first passivation layer and includes fluorine.;COPYRIGHT KIPO 2011
机译:目的:提供一种晶体管,其制造方法以及包括该晶体管的电子器件,以通过包括第二含氟的钝化层来抑制由于光和湿气导致的晶体管的特性变化。 ;构成:源极(S1)和漏极(D1)连接到沟道层(C1)的两端。栅极(G1)对应于沟道层。在沟道层和栅极之间形成栅极绝缘层(Gl1)。第一钝化层(P11,P12)覆盖源极,漏极,栅极和栅极绝缘层以及沟道层。第二钝化层形成在第一钝化层上并包含氟。; COPYRIGHT KIPO 2011

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