MEMS SENSOR PACKAGE CAPABLE OF MAINTAINING STABLE Q VALUE FOR THE DESIGNED SERVICE LIFE

摘要

PURPOSE: An MEMS(Micro Electromechanical Systems) sensor package is provided to prevent change of Q value by setting the pressure increase of a sensor body caused by a gas leakage within a predetermined range for the designed service life of the MEMS sensor package.;CONSTITUTION: A method for manufacturing a MEMS sensor package(10) comprises the steps of: setting a designed service life of a MEMS sensor(12), detecting an allowable deviation of Q value for the designed service life, detecting the predicted leakage speed of the MEMS sensor package, and selecting backfilling gas(14) and the pressure of backfilling gas pressure in order to maintain the Q value within the detected allowable deviation.;COPYRIGHT KIPO 2011