SELF TEST OF A MEMS GYROSCOPE HAVING AN ASIC INTEGRATED CAPACITOR CAPABLE OF SIMPLIFYING THE DESIGN OF A MEMS SENSOR

摘要

PURPOSE: A self test of a MEMS gyroscope having an ASIC integrated capacitor is provided to reduce the number of components and contact points of a circuit needed to a MEMS sensor.;CONSTITUTION: A device includes a MEMS gyroscope sensor with first and second sensing capacitors and an integrated circuit (110). The integrated circuit includes a switch circuit and a capacitance measuring circuit. The switch circuit electrically disconnects the first sensing capacitor from a first input unit and electrically connects the second sensing capacitor to a second input unit. The capacitance measuring circuit measures the capacitance of the second sensing capacitor of the MEMS gyroscope sensor while first electrical signals are applied to a disconnected first electric capacitance element.;COPYRIGHT KIPO 2013;[Reference numerals] (125) 90-degree phase shift