Self test of mems gyroscope with asics integrated capacitors

摘要

An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC, and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.