TEMPERATURE CONTROLLER FIXED TYPE DEVICE IN A GaAs SINGLE CRYSTAL GROWING APPARATUS CAPABLE OF MAINTAINING A REGULAR DISTANCE BETWEEN A TEMPERATURE CONTROLLER AND A HEATER

摘要

PURPOSE: A temperature controller fixed type device in a GaAs single crystal growing apparatus is provided to improve the yield of a single crystal by growing the single crystal at a constant temperature.;CONSTITUTION: Cold water flows in a chamber(101) to prevent deformation due to high temperature and pressure in a growing furnace. A quartz crucible receives GaAs solutions and boron oxide that is a liquid encapsulant for the GaAs solutions. A graphite heater(107) heats the quartz crucible. A heat insulator insulates heat from the graphite heater. A temperature controller controls the temperature by controlling the output of the graphite heater. A rubber ring maintains the vacuum and high pressure when a chamber and a temperature controller are mounted.;COPYRIGHT KIPO 2011