DRUG SOLUTION CIRCULATION APPARATUS CAPABLE OF PREVENTING DAMAGE OF A WAFER, EFFECTIVELY WASHING THE WAFER, AND IMPROVING A LIFETIME AND A BUBBLE ELIMINATION APPARATUS

摘要

PURPOSE: A drug solution circulation apparatus and a bubble elimination apparatus are provided to easily filter the drug solution circulating through a circulation line, thereby improving a filter lifetime.;CONSTITUTION: A first bass accepts drug solution. The drug solution which is flowing out from the first bass is circulated through the first bass by a circulation line(300). A bubble elimination part(700) is included in the circulation line and eliminates bubbles included in the circulated drug solution. The bubble elimination part is arranged between a heater part and a filter part. The heater part heats the drug solution. The filter part filters the heated drug solution.;COPYRIGHT KIPO 2012