MASK FOR SEQUENTIAL LATERAL SOLIDIFICATION AND SEQUENTIAL LATERAL SOLIDIFICATION APPARATUS THEREWITH

摘要

The present invention relates to the crystal for localizing continuous mask side, especially due to the crystallization overlapping area (Y-OL) of active layer model and dust pace are determined to be capable of the continuous side mask of localization for preventing phenomenon from occurring. The present invention, and it is middle mobile in a first direction, including the mask for selectively transmitting the laser issued from a generating device of laser, the width of mask is multiple longer cracks of the second direction one than the width of first direction perpendicular to first direction, and each crack provides a continuous side, it is determined, because localization is covered, it is characterised in that predetermined angular is formed to tilt relative to first direction.