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OPTICAL CRITICAL DIMENSION METROLOGY METHOD AND APPARATUS USING SPECTRAL INTERFEROMETRY
OPTICAL CRITICAL DIMENSION METROLOGY METHOD AND APPARATUS USING SPECTRAL INTERFEROMETRY
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机译:使用光谱干涉法的光学临界尺寸计量方法和装置
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摘要
PURPOSE: An optical critical dimension metrology method and an apparatus using a spectral interferometry are provided to increase measuring speed while obtaining SE parameter through one single shot. CONSTITUTION: A first spectrometer(16) and a second spectrometer(17) are arranged. A light source(10) projects the white light. A polariscope(12) polarizes the white light from the light source to a TM polarizer and a direction of 45 degrees from the TM polarizer. A beam splitter(13) makes a polarized linear white light to a measurement object. An OCD interferometer(14) forms a light interference with a measured light reflected from the target and a reference light reflected from a reference mirror.
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