CRUCIBLE SUPPORT AND MANUFACTURING APPARATUS OF SILICON CRYSTAL INGOT HAVING THE SAME

摘要

crucible support, and a silicon single crystal ingot production device comprising the same are disclosed. Silicon melt (Silicon Melt) was grown in a crucible support which is provided in the silicon single crystal manufacturing apparatus for manufacturing a silicon single crystal ingot, the crucible support is formed on one side of the pedestal and the pedestal is formed in a bar-like, the silicon melt comprises a support plate for supporting the crucible, and means for receiving, the depression being formed on the outer surface of the pedestal recess is provided. Thus, the silicon melt is leaked to the outside of the quartz crucible or the crucible support and coagulation off between tubes, when solidified in a state flowing on the pedestal, or when a foreign object between the inlet tube and the pedestal, the silicon melt or by removing the foreign matter or dispersion, prevent friction between the support and the crucible chamber for rotation and thereby there is an advantage capable of inhibiting the vibration (vibration) generated in the silicon melt.