首页> 外国专利> Guide beam for mounting of single crystal ingot and method for mounting single crystal ingot using the same

Guide beam for mounting of single crystal ingot and method for mounting single crystal ingot using the same

机译:用于安装单晶锭的引导梁和使用该引导梁的安装单晶锭的方法

摘要

PURPOSE: A guide beam and a method for mounting a single crystal ingot are provided to improve a nano-photography quality by preventing the generation of bending and warpage defects during the latter part of a cutting operation. CONSTITUTION: A mounter beam(26) sticks a mounter beam to the outer circumference of a single crystal ingot to be sawn. A guide beam(100) prevents the generation of bending and wapage defects while the single crystal ingot is cut. A guide beam is wide plate-shape unit. The lateral side of the guide beam includes a curve surface which corresponds to the shape of the ingot.
机译:目的:提供一种引导梁和一种用于安装单晶锭的方法,以通过防止在切割操作的后半部分中产生弯曲和翘曲缺陷来提高纳米摄影质量。组成:贴片机梁(26)将贴片机梁粘贴到要锯切的单晶锭的外周。引导梁(100)防止在切割单晶锭时产生弯曲和波纹缺陷。导向梁是宽板状的单元。导向梁的侧面包括与铸锭的形状相对应的弯曲表面。

著录项

  • 公开/公告号KR101006866B1

    专利类型

  • 公开/公告日2011-01-12

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20080123944

  • 发明设计人 이경무;김양섭;

    申请日2008-12-08

  • 分类号H01L21/301;

  • 国家 KR

  • 入库时间 2022-08-21 17:50:42

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