METHOD OF REDUCING CARBON CONTAMINATION GENERATED IN A ELECTRON ENERGY LOSS SPECTROSCOPY

摘要

PURPOSE: A method of reducing carbon contamination generated in electron energy loss spectroscopy is provided to easily remove carbon without drawing a sample holder to the outside of an electronic microscope during analysis, thereby easily removing carbon. CONSTITUTION: When carbon contamination is generated, a lens system of an electron energy loss spectroscopy device is adjusted so that a focus of an electronic beam for analysis is converted from a normal focus to an under focus. The focus of the electronic beam is adjusted on a sample. Carbon contamination generated by the electronic beam is removed. The size of the electron beam is 1 ~ 1.5.