A METHOD FOR FABRICATING METAL NANOPIN ARRAY AND AN ELECTRON EMISSION ELEMENT USING THE NANOPIN ARRAY

摘要

The present invention is the control of the position and shape , as well as exhibit excellent electron emission efficiency than the conventional nanorods and with the object of the present invention to provide a method for producing nano easy pin array . ; the production method according to the present invention for achieving the object is to form a thin film of the material constituting the nano- pins on the substrate and , after forming a nano- template on the thin film by etching the thin film with a nano- template until the nano- template is completely removed , characterized in that the pin so that the nano- array according to the pattern of the nano- template on a substrate to form and a . ; nano pin array formed in accordance with the present invention is to have a very sharp shape of a few nanometers or less exhibits excellent efficiency as a field emitter .