Off-axis method of dual-wavelength digital holographic 3D measurement device for using

摘要

The present invention relates to a 3D measuring apparatus using the dual-wavelength digital holographic the Off-axis method, the first imaging unit and the second imaging unit; And a first light source for emitting a first linearly polarized beam; A second light source for emitting a second linearly polarized beam of the first linear polarized light beam having a different wavelength and the polarization direction perpendicular to the polarization direction of the first linearly polarized beam; And a first beam splitter for splitting the output by the first light source and the first linearly polarized beam and the second linear polarized light beam that is incident from the second light source to each measuring beam path and a reference beam path; Off-axis method is inclined with respect to the reference beam path and a reference mirror disposed so as to be applicable; The first of the first linearly polarized beam that is emitted from the beam splitter and the second beam is a linearly polarized outgoing light is first linearly polarized beam and the second linear polarized light beam from the first beam splitter so that the reflected from the reference mirror and the second beam splitter facing the direction of the reference mirror; Wherein the wherein the first linear polarized light beam that is emitted from the first beam splitter and the first and the second linear polarized light beam that is emitted from the first beam splitter such that the linearly polarized light beam reflected from the measurement object and the second linear polarized beam and the third beam splitter facing the direction of the measurement object; The first linearly polarized beam and the second linear polarized light beam reflected from the reference mirror, respectively the first reference beam and a second reference beam formed with said first linearly polarized beam and the second beam is linearly polarized in each of the measured and a fourth beam splitter for the first measuring beam and the second measuring beam is reflected to the output formed by dividing the first image pickup unit and a direction from the object to the second image pickup section; Disposed between the first imaging unit and said second beam splitter, the first measuring beam and the first beam being passed through the second interference measurement beam and the second reference beam formed by the interference between the first reference beam interfering the second passage is blocked as the first linear polarizer aligned to the polarization state of the beam formed by the interference between; The second is disposed between the imaging unit and said second beam splitter, and the second linear polarizer arranged that the first passage of the interference beam is blocked by the second polarized light beam passes through the interference as possible; Characterized in that it comprises the first imaging unit and the control unit for measuring the surface shape of the measurement object by using the two holograms which is picked up by the second sensing unit.