Substrate buffer device for manufacturing equipment for flat panel display and its driving method

摘要

In the present invention, a substrate is moved along a transport track and at least one substrate treatment process is performed, and the substrate is received from an external first robot and placed on the transport track or the substrate is completed from the transport track. The present invention relates to a substrate buffer device that lifts and delivers it to an external second robot.;Specifically, the present invention provides a buffer track for extending the transport track; A pair of buffers provided on both sides of the buffer track and having a body frame capable of moving and lifting in a plane for adjusting the distance therebetween, and a plurality of basket bars connected to one end of the body frame and the other end facing each other. Hand; And a kit bar driving assembly mounted to each of the buffer hands such that the kit bars are in a first state orthogonal to the substrate transfer direction or a second state rotated with respect to the other end and driven to one side. Provided is a substrate buffer device for a manufacturing facility, and together with the method of driving the substrate buffer device.;As a result, there is an advantage in reducing the space required for the operation of each buffer hand and at the same time shortening the operation cycle.