transmitted light and the refractive index of the medium using a flatbed interference of the reflected light measurement systems and methods

摘要

This invention relates to the refractive index measurement system and method of the plate-like medium by the interference of the transmitted light and the reflected light a laser light source for irradiating a beam on the plate-like sample; Light detecting means for measuring the intensity of the transmitted or reflected light of the interference pattern caused by multiple reflection of the laser beam from the laser light source that passes through the plate-like sample as a function of angle of incidence; And between the plate-like intensity of the transmitted or reflected light by the overlapping of the electric field of the laser beam when the incident angle of for the sample (I _T ( )) to obtain the equation 1 and the neighboring two beam obtaining the phase difference ( ( )) of the maximum or minimum point of the intensity of the incident angle of the theoretical transmission of the transmitted light or the reflected light intensity from the equation (2) to obtain, the incident angle of the maximum or minimum point, as measured by these light detecting means and the relative refractive index compared to the smallest error (n _r ) and has a computing means to obtain the thickness (d). ; The equation (1) ; and, ; Equation 2 ; and, ; Equation (3) ; a.