首页> 外国专利> METHOD OF GROWTH OF MONOCRYSTAL OF SAPPHIRE ON SEED CRYSTAL, WHICH IS REMAINED IN MELT, IN AUTOMATIC MODE

METHOD OF GROWTH OF MONOCRYSTAL OF SAPPHIRE ON SEED CRYSTAL, WHICH IS REMAINED IN MELT, IN AUTOMATIC MODE

机译:自动模式下蓝宝石单晶在种子晶体上生长的方法

摘要

A method for growing sapphire single crystal on the seed crystal, remaining in the melt, in the automatic mode, comprising vacuum, inoculated and growing a single crystal while reducing the melt temperature, the calculation values ​​of the drawing speed and measuring the growing monocrystal weight, and the identification and compensation of deviations between the measured and set point values geometric forms of a single crystal by controlling the temperature of the melt and the rate of withdrawal in the respective channels automata ble systems, characterized in that the pre-block is introduced into the constants values ​​of the following process parameters: ? T - the maximum allowable gradient scull temperature determined empirically, ° C! tu - constant inertia time scull, determined empirically,,! k1 - constant temperature of the heater, V / ° C, using the formula! ! where Uplavleniya - voltage on the heater corresponding to the melting temperature of the batch, B! Tplavleniya - the melting point of the charge, ° C! Von - vertical movement speed down the seed crystal, m / s! h1 - the distance from the lower end of the seed crystal to the upper edge of the crucible, m! Hm - the depth of the crucible, m! ρp - the density of the melt in kg / m3! Dm - the inner diameter of the crucible, m! hkr - the length of the seed crystal, m! Vcr - given crystallization rate, m / s, selectable empirically according to the requirements for the quality of the single crystal condition 6 10-6≤Vkr≤30 · · 10-6! d - the nominal diameter of the neck of a single crystal, m, range of values ​​which does not affect the quality of a single crystal, but depends on the weight of the single crystal! ρk
机译:一种以自动模式在晶种中保留在熔体中的蓝宝石单晶生长的方法,该方法包括真空,在降低熔体温度的同时接种并生长单晶,拉伸速度的计算值和测量生长通过控制熔体的温度和各个通道自动系统中的退出速率,可以确定单晶重量,以及确定和补偿单晶的测量值和设定值几何形状之间的偏差,其特征在于,被引入以下过程参数的常量值中: T-根据经验确定的最大允许斜度双桨温度,°C! tu-根据经验确定的恒定惯性时间双桨,! k1-加热器的恒温,V /°C,使用公式! !其中Uplavleniya-加热器上的电压对应于批次的熔化温度B! Tplavleniya-电荷的熔点,℃!冯-垂直移动速度降低了籽晶,m / s! h1-从籽晶下端到坩埚上边缘的距离,m!嗯-坩埚的深度,米! ρp-熔体密度(千克/立方米)! Dm-坩埚的内径,m! hkr-晶种的长度,m! Vcr-给定的结晶速率m / s,可根据单晶质量的要求凭经验选择610-6≤Vkr≤30··10-6! d-单晶颈的公称直径m,该值的范围不影响单晶的质量,但取决于单晶的重量! ρk

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