Method for manufacturing wheel of clock element in clock industry, involves forming unit in lower layer for forming another cavity of another wheel to structure photo resist resin at side of lower layer that forms liner at walls of cavity

摘要

The method involves providing a substrate that contains an upper layer and a lower layer. The upper layer and the lower layer are joined together by an intermediate layer that is made of silicon dioxide. A unit is formed in the upper layer and the intermediate layer to form a cavity of a wheel (55). Another unit is formed in the lower layer for forming another cavity of another wheel (57) to structure photo resist resin at a side of the lower layer. The former cavity is coated with gold, and the lower layer forms a liner (51) at walls of the latter cavity. An independent claim is also included for a wheel.