Active probe for atomic resolution atomic force microscope and method of using same

摘要

An AFM for analyzing a sample at a predetermined sampling rate in contact mode, comprising: a self-actuated cantilever with a Z-positioning element and a tip attached thereto, which contacts the sample substantially continuously during a scan operation; a first feedback circuit responsive to a scan vertical displacement of the self-actuated cantilever generates a cantilever control signal, a springback control signal responsive second feedback circuit for generating a position control signal, the cantilever control signal being input to the second feedback circuit such that the first feedback circuit is interleaved within the second feedback circuit, and a Z-position actuator responsive to the position control signal for positioning the self-actuated cantilever or sample to adjust the distance between the self-actuated cantilever and to change the sample.