PROBE-SAMPLE DISTANCE MEASURING METHOD IN ATOMIC FORCE MICROSCOPE AND ATOMIC FORCE MICROSCOPE USING THE METHOD

摘要

Provided in the present invention are a probe-sample distance measuring method for an atomic force microscope using a diffraction phenomenon, and an atomic force microscope applying the method. The probe-sample distance measuring method for an atomic force microscope using a diffraction phenomenon comprises as follows: a light radiating step which radiates light between a probe and a sample; and a distance measuring step which measures a distance between the probe and the sample by calculating a diffraction pattern generated between the probe and the sample by the radiated light. In addition, the atomic force microscope comprises: a light source which radiates light between a sample and a probe; a detecting unit which detects the diffraction pattern of the light coming out from between the sample and the probe; a converting unit which converts the diffraction pattern into an electric signal; and a distance calculating unit which calculates a distance between the sample and the probe from the electric signal obtained by the converting unit. [Reference numerals] (110) Probe; (115) Laser; (140) Lock-in amplifier; (150) Adjusting device; (160) Computer; (170,BB) Mirror; (180) Laser light source; (190) Stepped pulley scanner; (AA) Light detector; (CC) Photodiode; (DD) Specimen; (EE) Planar scanner