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Production of a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors
Production of a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors
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机译:为CCD或CMOS图像传感器生产具有目标扩展和方向的偏振敏感滤光片
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摘要
Method for producing a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors, characterized in that the following steps are carried out: - coating a carrier (200) by means of a lithography process with lacquer (201), with certain areas of the carrier (200) are freed from the coating (201) by exposure and etching, - application of a polarizing filter material (206) with a predetermined orientation at a first predetermined angle relative to the carrier (200), the polarizing filter material (206) in the freed areas is pressed in, wherein the orientation of the filter material (206) does not change as a result of the press-in process, - removing the excess polarizing filter material (206) and at least part of the lacquer (201) of the covered areas by etching and / or polishing after the polarizing filter material has hardened (206) on the carrier (200 ), and - successively repeating the previous steps with different orientations of the polarizing filter material (206) with predetermined orientation at a different angle relative to the ...
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