首页> 外国专利> Production of a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors

Production of a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors

机译:为CCD或CMOS图像传感器生产具有目标扩展和方向的偏振敏感滤光片

摘要

Method for producing a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors, characterized in that the following steps are carried out: - coating a carrier (200) by means of a lithography process with lacquer (201), with certain areas of the carrier (200) are freed from the coating (201) by exposure and etching, - application of a polarizing filter material (206) with a predetermined orientation at a first predetermined angle relative to the carrier (200), the polarizing filter material (206) in the freed areas is pressed in, wherein the orientation of the filter material (206) does not change as a result of the press-in process, - removing the excess polarizing filter material (206) and at least part of the lacquer (201) of the covered areas by etching and / or polishing after the polarizing filter material has hardened (206) on the carrier (200 ), and - successively repeating the previous steps with different orientations of the polarizing filter material (206) with predetermined orientation at a different angle relative to the ...
机译:一种用于CCD或CMOS图像传感器的,具有目标膨胀和定向的偏振敏感滤光器的制造方法,其特征在于,进行以下步骤:-通过光刻工艺用漆(201)涂覆载体(200),其中通过曝光和蚀刻将载体(200)的某些区域从涂层(201)上除去,-以相对于载体(200)的第一预定角度施加具有预定取向的偏振滤光材料(206)。压入自由区域中的滤光材料(206),其中滤光材料(206)的方向不会因压入过程而改变,-去除多余的偏振滤光材料(206)和至少一部分在偏振滤光片材料在载体(200)上硬化(206)之后,通过蚀刻和/或抛光对覆盖区域的漆(201)进行抛光,并且-以偏振器​​的不同方向连续重复先前的步骤ng过滤材料(206)以相对于滤光片的不同角度的预定方向取向。

著录项

  • 公开/公告号DE102005031966B4

    专利类型

  • 公开/公告日2011-10-27

    原文格式PDF

  • 申请/专利权人 GÜNTER GRAU;

    申请/专利号DE20051031966

  • 发明设计人 GLEICH PATENTINHABER;

    申请日2005-07-08

  • 分类号G02B5/30;

  • 国家 DE

  • 入库时间 2022-08-21 17:48:03

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