Method and device for performing an optical comparison between at least two patterns, preferably by comparing selectable sections

摘要

An improved method and an improved apparatus for performing an optical comparison between at least two patterns, preferably by comparing selectable sections, are characterized by the following features: the pattern to be examined and characterized by a non-uniformity in the structure and / or color (UR, LE , I) is illuminated by scattered light, - from the light to be examined by the pattern (UR, LE, I) reflected light by means of a spectrometer (23) generates an interference spectrum, - the interference spectrum generated by the spectrometer (23) is on a camera (25, 25 '), the interference spectrum obtained therefrom and / or values of the pattern (I) derived therefrom serve as pattern values, which are compared with correspondingly obtained pattern values of a reference pattern (UR, LE) ,