Apparatus for treating an inner surface of a tube for material removal, surface smoothing and removal of the unwanted substances, comprises a heating source, and a feeding device for thermally and/or photo-chemically activated etching gas

摘要

The apparatus for treating an inner surface of a tube (1) for material removal, surface smoothing and removal of the unwanted substances, comprises a heating source (2), and a feeding device (3) for a thermally and/or photo-chemically activated etching gas (4), where a heating of the partial areas of the tube to be treated and a contact of the partial areas of the tube to be treated with the fed etching gas take place and means is provided to remove the elements separated from the inner surface of the tube. The heating source is arranged in the form of plasma. The apparatus for treating an inner surface of a tube (1) for material removal, surface smoothing and removal of the unwanted substances, comprises a heating source (2), and a feeding device (3) for a thermally and/or photo-chemically activated etching gas (4), where a heating of the partial areas of the tube to be treated and a contact of the partial areas of the tube to be treated with the fed etching gas take place and means is provided to remove the elements separated from the inner surface of the tube. The heating source is arranged in the form of plasma. The etching gas is sulfur hexafluoride and/or oxygen. The means is a collector electrode and/or a liquid stream guided through an interior of the tube. The collector electrode is arranged as a constantly circulating belt (5) in a longitudinal direction of the tube. The circulating belt is cleaned outside of the tube from the adhered elements separated from the inner surface of the tube. The collector electrode is formed as rod-shaped element, which has three-time the length of the tube to be treated, is subjected to a periodic upward- and downward movement and is cleaned outside of the tube from the adhered elements separated from the inner surface of the tube during the upward- and downward movement. The ignition of the plasma takes place outside of the tube and/or in the interior of the tube.