Magnetometer e.g. inclination sensor, for electronic compass to detect geomagnetic field, has oscillating structure comprising electrical line, and detector for determining tilting of oscillating structure with respect to substrate

摘要

The magnetometer has a substrate (1), and a point support (2) arranged on the substrate. An oscillating structure (3) is tiltably supported on the support, and has an electrical line (4). The electrical line is guided into a winding around a supporting point of the oscillating structure. A detector (5) i.e. capacitive detector, determines tilting of the oscillating structure with respect to the substrate, and comprises electrodes (11a, 11b, 21a, 21b) that are formed on the substrate. The substrate, support, oscillating structure and the detector are formed as micro-mechanical structures. An independent claim is also included for a method for measuring magnetic flux density with a magnetometer.