Rotary rate sensor e.g. micromechanical rotary rate sensor, for e.g. motor vehicle, has drive units producing planar drive oscillatory movement to oscillating structure, and evaluation units detecting rotation in rotation axes, respectively

摘要

The sensor has a substrate (10), a support (20), and an oscillating structure, which are mounted at the support by springs (30) and rotatably movable for implementing of a planar drive oscillatory movement. Drive units produce the planar drive oscillatory movement to the oscillating structure, and two evaluation units detect rotation in two rotation axes, respectively. The oscillating structure implements drive oscillating movement around a height axis.