Apparatus for the production of a compound semiconductor, a method for producing a compound semiconductor and clamping device for the production of a compound semiconductor

摘要

Compound semiconductor production and before the direction of the form of layers of a compound semiconductor, with the use of organometallic chemical vapor deposition, which comprises:a reaction vessel;a material feed opening, which a material gas of the compound semiconductor supplies from the outside into the reaction vessel;a carrier which, in the reaction vessel is arranged, wherein the support has a molded body to such, that a surface formed of the shaped body according to the top; andan opposite element, which extends over the shaped body which is supported by the support, is arranged, the opposite element with an opposite surface of the surface formed thereon, wherein the opposite surface of the formed surface is facing.