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wu00e4rmesteuerung deposition in dpn (dip pen nanolithography)

机译:dpn中的w u00e4rmesteuerung沉积(浸笔纳米光刻)

摘要

The invention discloses a device applied in the nano lithography a heat control method for making the solid organic ink deposit on the base-plate from the needlepoint of the atomic microscope. The invention can be used to start and stop the ink depositing on the base-plate by the means of increasing the temperature to higher than the fluxing temperature of the ink or decreasing the temperature to lower than the fluxing temperature of the ink. The allowance of the ink deposition can be started and stopped and the deposition rate can be changed without interruption of the contact between the needlepoint and base-plate, so that the method may be useful. Uniform needle points may used for imaging without pollution. The invention allows the ink deposition in the vacuum chamber. The invention obtains a higher spatial resolution when the ink has a lower surface mobility after cooling.
机译:本发明公开了一种用于纳米光刻的装置,该装置是一种用于从原子显微镜的针尖使固体有机油墨沉积在基板上的热控制方法。本发明可以通过将温度升高到高于油墨的熔化温度或降低温度到低于油墨的熔化温度来开始和停止沉积在基板上的油墨。在不中断针尖与基板之间的接触的情况下,可以开始和停止墨水沉积的余量,并且可以改变沉积速率,因此该方法可能是有用的。均匀的针尖可用于成像而无污染。本发明允许墨水沉积在真空室中。当墨水在冷却后具有较低的表面迁移率时,本发明获得较高的空间分辨率。

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