FLATNESS DETECTION APPARATUS AND FLATNESS DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flatness detection apparatus which is capable of easily detecting flatness in simple configuration, and a flatness detection method.;SOLUTION: A flatness detection apparatus 1 comprises measurement data acquisition means 141 which acquires measurement data from a three-dimensional measuring device 2, first measurement point acquisition means 143 which acquires a first measurement point on a measurement face to be inspected, first shape calculation means 144 which calculates a geometrical shape expression of the measurement face to be inspected from the first measurement point, second measurement point acquisition means 145 which acquires a second measurement point belonging to an adjacent measurement face from the measurement data, second shape calculation means 146 which calculates a geometrical shape expression of the adjacent measurement face from the second measurement point, outer edge calculation means 147 which calculates an intersection line or an intersection point between the measurement face to be inspected and the adjacent measurement face, corrected measurement face calculation means 148 which calculates the geometrical shape expression of a corrected measurement face to be inspected on the basis of the intersection line or the intersection point, and flatness detection means 149 which detects flatness of the face to be inspected on the basis of the geometrical shape expression of the corrected measurement face to be inspected.;COPYRIGHT: (C)2013,JPO&INPIT