IMAGE ACQUISITION DEVICE FOR IRREGULARITY INSPECTION, IRREGULARITY INSPECTION DEVICE, AND POSITION DETERMINATION METHOD FOR IRRADIATION PART

摘要

PROBLEM TO BE SOLVED: To suppress influence of light emission irregularity of an irradiation part on an irregularity inspection image.;SOLUTION: An image acquisition device 11 for irregularity inspection includes a stage 2 on which a substrate 9 is mounted, an irradiation part 3 which irradiates an inspection surface 91 of the substrate 9 with illumination light, and an imaging part 41 which receives illumination light reflected by the inspection surface 91. The imaging part 41 includes a line sensor 411 and an imaging optical system 412. Light which is intense enough for irregularity inspection is incident on respective light receiving elements of the line sensor 411. The imaging optical system 412 is non-telecentric on an object side, and a focusing position which is conjugate to the position of the line sensor 411 shifts from the inspection surface 91 toward the imaging part 41. The image acquisition device 11 for irregularity inspection is characterized in that the distance between the irradiation part 3 and inspection surface 91 in a direction along an optical axis J1 is equal to or larger than 100 mm. Consequently, the influence of light emission irregularity of the irradiation part 3 on the irregularity inspection image can be suppressed.;COPYRIGHT: (C)2013,JPO&INPIT