SIMULATOR, PROCESSING DEVICE, DAMAGE EVALUATION METHOD, AND DAMAGE EVALUATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To calculate the damage of a workpiece occurring by a predetermined processing such as ion injection in a shorter time.SOLUTION: The simulator 10 is configured to include an input unit 11, and a damage operation unit 12. The damage operation unit 12 acquires the damage of a workpiece which is obtained by calculating the relation of the amount of a first substance injected from a predetermined gas into the workpiece and the amount of a second substance discharged from the workpiece by injection of the first substance at predetermined evaluation points of the workpiece by a flux method.