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Simulator, processing apparatus, damage evaluation method, and damage evaluation program
Simulator, processing apparatus, damage evaluation method, and damage evaluation program
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机译:模拟器,处理装置,损伤评价方法以及损伤评价程序
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摘要
Disclosed herein is a simulator including: an input section adapted to acquire processing conditions for a given process performed on a workpiece; and a damage calculation section adapted to acquire the damage of the workpiece, based on the processing conditions, by calculating, using a Flux method, the relationship between the amount of a first substance externally injected onto a given evaluation point on the workpiece during the given process and the amount of a second substance released from the given evaluation point on the workpiece as a result of the injection of the first substance.
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