FLAW INSPECTION DEVICE, FLAW INSPECTION SYSTEM AND FLAW INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flaw inspection device, a flaw inspection system and a flaw inspection method for inspecting a surface of an inspection object in short time.;SOLUTION: A flaw inspection device comprises: a light irradiation part 8 for irradiating a surface of a film 2 under movement with line-shaped inspection light L whose intensity is changed at a prescribed frequency; a mirror 12 for condensing scattering light M output from the film 2 as a result of the irradiation with the inspection light L; a photoelectric conversion part 15 for outputting an output signal S_M in accordance with intensity of the scattering light M condensed by the mirror 12; and a frequency comparison part 32 for outputting a frequency comparison signal S_F corresponding to whether or not the output signal S_M has the same frequency as the inspection light L.;COPYRIGHT: (C)2012,JPO&INPIT