MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, AND HEAD SUSPENSION

摘要

PROBLEM TO BE SOLVED: To easily and surely form a coating on an end face without reduction in piezoelectric element yield.SOLUTION: It is characterized that a piezoelectric element 33 is cut out of a base material 75 as a tabular piezoelectric material, end faces 67, 69, 71 and 73 on the outer periphery of the piezoelectric element 33 are formed by the cutting-out, and a coating is formed by vapor deposition polymerization of a polymeric compound on the end faces 71 and 73 of the piezoelectric element 33. Therefore, coatings 49 and 51 can be easily and surely formed on the end faces 71 and 73 of the piezoelectric element 33 in polymer atmosphere gasified by vapor deposition polymerization, without reduction in the yield of the piezoelectric element 33.