NANO-THIN-FILM YOUNG'S MODULUS MEASURING DEVICE AND MEASURING DEVICE DESIGN METHOD

摘要

PROBLEM TO BE SOLVED: To provide a resonance device that aims at high-accuracy measurement of Young's modulus of a nano thin film and that is equipped with a shape parameter with a reduced error of substrate Young's modulus.;SOLUTION: A resonance device in the invention has an approximately fan-shaped outline formed on a substrate, is provided in a manner capable of rotating around an axis vertical to the substrate on a support part that serves as a pivot of the fan shape, and one side of the fan shape is formed into a comb electrode for applying electrostatic attraction. With respect to the resonance device, each size of width (w), length (L) and thickness (t) of the support part is determined under conditions that a first proportion (w/t) of width (w) to thickness (t) of the support part is within a range from 0.5 to 3, a second proportion (L/t) of length (L) to thickness (t) of the support part is within a range from 5 to 20 and a proportion (L/w) of the second proportion to the first proportion is 5 or more. Therefore, an error in calculating a Young's modulus of the single resonance device can be reduced to 8% or less.;COPYRIGHT: (C)2013,JPO&INPIT