TEMPERATURE TESTING DEVICE, TEMPERATURE TESTING METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To cause an IC temperature to accurately transition to a desired setting temperature without using a thermostatic bath.;SOLUTION: A temperature control part 40 of a temperature testing device 1 obtains sensor information indicating measured temperatures from a temperature sensor 10 that measures the temperature of a target IC11 being in a heating state; stores, in a control memory 30, a current temperature and a previous temperature of the measured temperatures on the basis of the obtained sensor information; compares the currently measured temperature with a set temperature T_S that is stored in the control memory 30 in advance; and compares the currently measured temperature with the previously measured temperature. The temperature control part 40 determines the transition state of the temperature of IC11 with respect to the set temperature T_S on the basis of the result of comparison between the current temperature and the set temperature T_S and the result of comparison between the current temperature and the previous temperature; and causes a cooling device 20 to cool IC11 at a cooling intensity that is higher or lower than a previous one, or at the same cooling intensity as the previous one, on the basis of the determined transition state.;COPYRIGHT: (C)2013,JPO&INPIT