IRREGULARITY INSPECTION SYSTEM, IRREGULARITY INSPECTION METHOD, AND SHEET MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To detect defects of an inspection object even when the defects have concave shapes or convex shapes, and to inspect sheets not having transparency, having low transparency, or having a surface with glossiness.;SOLUTION: An irregularity inspection system 1 inspects an irregularity on an inspection object surface by radiating light to the inspection object surface of the inspection object and using its reflection light, and inspects presence/absence of the irregularity based on an image obtained by imaging the inspection object surface by radiating light by using a coaxial vertical illumination device 22 arranged at a position facing the inspection object surface and radiating light to the inspection object surface, and an oblique illumination device 21 radiating light to the inspection object surface from an oblique direction.;COPYRIGHT: (C)2012,JPO&INPIT